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Laboratory equipment for cleaning high vacuum systems in the nature of an in situ plasma source and controller, namely, a plasma hydrocarbon contamination cleaner in the nature of a inductively coupled plasma source and chamber for downstream plasma cleaning of SEMs (Scanning Electron Microscopes), TEMs (Transmission Electron Microscopes), FIBs (Focused Ion Beams), and e-beam inspection vacuum systems, namely, mask repair tools, review SEMs, critical dimension SEMs, all to remove and mitigate hydrocarbon and carbon deposits on surfaces and in the gas phase